The A800TBS atomic layer deposition system is used for industrial-scale wafer-level optics applications, including grating gap filling, 3D surface modification, device packaging, and deposition of anti-reflective coatings.

The A300P is a single-wafer system designed for processes involving Mini/Micro LED, OLED, power devices, VCSEL, and wafer optics, featuring a 12-inch wafer process chamber and modular configurations like ICP ion source and loadlock.