is possible to monitor the geometric composition of fine surfaces during every step of development and production. Processes can be directly controlled and optimized, so standards can be checked in a cost- and time-efficient manner. The confovis technology is based on structured LED lighting. Unlike in conventional confocal microscopy, during the scanning process, there is no rotating pinhole disk or other moving mechanical parts, such as the use of scanning mirrors. Instead, the necessary depth selection is ensured through the analysis of an illumination pattern in the focal plane. A static mask coordinates the rays of the quickly activated light sources.