X-ray Photoelectron Spectroscopy (XPS) is a surface chemical analysis technique used to measure the elements and chemical states of materials for concentrations above 0.1 to 1 Atomic %, depending on the element.

X-Ray Diffraction (XRD) and X-Ray Reflectivity (XRR) are techniques used to analyze crystallographic structures and thin films on substrates, providing information on structures, phases, and other structural parameters.