| Website | pivotalsys.com |
| Category | Software |
| Phone | 925-924-1480 |
| info@pivotalsys.com | |
| Employees | |
| Founded | 2003 |
| TOTAL | $10M |
| FUNDING TOTAL | $10M |
| Series B, 1/06 ITU Ventures US Venture Partners Enterprise Partners | $10M |
Pivotal Systems Corp. provides process matching solutions for the semiconductor industry. It offers Omega3.0 end point system for di-electric etch processes, as well as a fault detection system to prevent etch-stop and wafer mis-processing events. The company also provides GasFlowMonitor, a precise in situ monitor for the detection of gas flow variations; and AsherFD active endpoint and fault detection system for remote and non-remote plasma source PR strip/ash. In addition, it offers LeakDetect for the in situ detection of low level atmospheric leaks due to o-ring seal failures for CVD and etch chambers; CleanEP active endpoint for HDP-CVD in situ dry cleans; and ToolTrace Diagnostics, a diagnostic hardware/software package for data visualization and chamber matching. Pivotal Systems Corp. was founded in 2003 and is based in Pleasanton, California.
